Zygo Verifire HDX干涉仪
Verifire HDX 干涉仪，文章来源于AMETEK阿美特克zygo，中频信息表征，具有同类最佳的分辨率和 ITF曲线，Verifire HDX干涉仪系统干涉仪的分辨率已达其上限。Verifire HD 和 Verifire HDX 干涉仪系统可对光学表面进行无与伦比的中空间频率表征。仅仅在系统中增加更多的像素是不够的，我们需要严格的光学设计，才能确保干涉仪的像素限制性能，并捕捉最苛刻的应用所需的表面细节。ZYGO 专有的干涉系统相位传递函数（ITF）表征方法确保了性能与预期相符，可提供您应用所需的功能。ZYGO新型Verifire HDX激光干涉仪是为超高精度的光学元件和系统设计和制造的，可以获得元件表面的中频特征信息。系统包含现有Verifire HD的所有功能-比如QPSI和长寿命稳频的激光器，并增加了重要的增强功能，如刷新行业水平的分辨率和成像能力，仪器传递函数（ITF）、出众的中频特征分析和大坡度表面测试，同时也兼具了ZYGO DynaPhase®系列动态采集技术，可以去除震动引起的问题并且能够在近乎任何环境中精准计量。AMETEK 阿美特克ZYGO 的 Verifire HD 和 Verifire HDX 被设计和制造用于表征极致性能光学元件和系统的中频信息。 标准配置包括 QPSI 以及 ZYGO 制造的长寿命稳定激光器、一流的成像和分辨率、高仪器传递函数（ITF）、卓越的中频能力和高斜率表面偏差表征功能。Verifire HDX Interferometer, Article from AMETEK AMETEK zygo, Medium Frequency Information Characterization with Best-in-Class Resolution and ITF Curves The Verifire HDX Interferometer System interferometers are at the upper end of their resolution range.The Verifire HD and Verifire HDX Interferometer Systems provide unparalleled medium spatial frequency characterization of optical surfaces. Simply adding more pixels to a system is not enough, we need a rigorous optical design to ensure the pixel-limited performance of the interferometer and capture the surface detail needed for the most demanding applications. zYGO's proprietary interferometric phase transfer function (ITF) characterization methodology ensures that the performance is as expected and delivers the functionality you need for your application. zYGO's new Verifire HDX laser interferometer is designed for ultra-high precision interferometry. The new Verifire HDX laser interferometer from ZYGO has been designed and manufactured for ultra-high precision optical components and systems to obtain mid-frequency characterization information on component surfaces. The system includes all the features of the existing Verifire HD - such as QPSI and long-life, frequency stabilized lasers - and adds important enhancements such as industry-breaking resolution and imaging capabilities, Instrument Transfer Functions (ITFs), superior IF characterization, and large-slope surface testing, as well as ZYGO's DynaPhase® series of dynamic acquisition technologies that Vibration-induced problems are eliminated and accurate metrology is possible in virtually any environment.ZYGO's Verifire HD and Verifire HDX are designed and manufactured to characterize IF information for extreme performance optics and systems. Standard features include QPSI as well as long-life stabilized lasers manufactured by ZYGO， state-of-the-art imaging and resolution， high instrument transfer function (ITF)， excellent IF capability and high slope surface deviation characterization.Key Features.
主要特点(Main features)
1、530 万像素（Verifire HD）和 1160万像素（Verifire HDX）摄像机分辨率，辅以严谨的光学设计，并且还通过了 ZYGO 专有的 ITF 认证技术验证。5.3 megapixel (Verifire HD) and 11.6 megapixel (Verifire HDX) camera resolutions are complemented by a rigorous optical design and validated by ZYGO's proprietary ITF-certified technology.
2、ZYGO 独有的 QPSI™ 采集技术，可在振动较常见的环境中实现可靠的测量，ZYGO's unique QPSI™ acquisition technology for reliable measurements in environments where vibration is common.
2、ZYGO 独有的 QPSI™ 采集技术，可在振动较常见的环境中实现可靠的测量，ZYGO's unique QPSI™ acquisition technology for reliable measurements in environments where vibration is common.
3、ZYGO 制造的 HeNe 激光源；HeNe laser source made by ZYGO.
4、比市面上的激光器寿命更长，寿命长达 6 万小时；Longer life than the market laser， life up to 60，000 hours.
5、更高的功率，改善了抗振性能，适合微光应用；Higher power， improved anti-vibration performance， suitable for micro-optical applications.
6、波长稳定在 0.0001 nm；wavelength stabilization at 0.0001 nm.
7、可选的 DynaPhase™ 瞬时数据采集技术，对振动不敏感，可在最恶劣的环境中进行测量；optional DynaPhase™ instantaneous data acquisition technology， insensitive to vibration， can be measured in the harshest environments.
8、相干环纹抑制系统（CARS）消除了内部环纹的靶心，并将测量中的相干噪声降低了 10 倍；Coherent Annular Ripple Suppression System (CARS) eliminates the internal annular bullseye and reduces coherent noise in measurements by a factor of 10.
特殊设计优化的分辨率和性能(Special design optimized for resolution and performance)
Verifire HDX激光干涉仪系统具有全新的光学设计，经过严格设计，可为其所配的3.4kx 3.4k（1160万像素）传感器提供突破像素限制的性能，呈现增强的图像，可以显示出较低分辨率干涉仪难以辨识的表面特征。这种超高的空间分辨率不会以牺牲速度为代价，该系统在全分辨率下以帧率96 Hz运行，比其它高分辨率干涉仪速度快10倍，那些由于采样速度较慢在采样的时候会引入震动误差从而测试能力受限。功率谱密度（PSD）和衍射分析工具完善了Verifire HDX激光干涉仪系统的中频特征分析能力，并通过简单直观的用户界面来分析和报告综合表面特性。The Verifire HDX laser interferometer system features a new optical design that has been rigorously engineered to deliver pixel-busting performance for its fitted 3.4kx 3.4k (11.6 megapixel) sensor, presenting enhanced images that reveal surface features that are difficult to recognize with lower resolution interferometers. This ultra-high spatial resolution does not come at the expense of speed, as the system operates at a frame rate of 96 Hz at full resolution, which is 10 times faster than other high-resolution interferometers, which are limited in their ability to test due to the vibrational errors introduced at the time of sampling due to slower sampling speeds. Power Spectral Density (PSD) and Diffraction Analysis tools complete the mid-frequency characterization capabilities of the Verifire HDX laser interferometer system, with a simple and intuitive user interface to analyze and report on comprehensive surface properties.
深圳银飞有售 Verifire HDX干涉仪高质量的参考光学元件和配件(High quality reference optics and accessories)
UltraFlat™和UltraSphere™超高精度透射平面和球面，面形可以达到λ/40 PVr或更高，并且严格控制PSD特征进行制造，以最优化中频特征。推荐将这些高精度参考光学元件与Verifire HDX激光干涉仪一起配合使用，以完整实现和提升系统的性能。无论它们是被用于垂直构型还是水平构型，UltraFlat透射平板面形精度不变，从而在测试设置中提供更大的灵活性。UltraFlat™ and UltraSphere™ ultra-high precision transmissive planes and spheres with face shapes up to λ/40 PVr or better and manufactured with tightly controlled PSD features to optimize IF characteristics. These high-precision reference optics are recommended for use with the Verifire HDX laser interferometer for complete system realization and performance enhancement. Whether they are used in vertical or horizontal configurations, the UltraFlat transmissive flat surface shape accuracy remains unchanged, providing greater flexibility in test setups.
Mx™ 软件(Mx™ Software)
ZYGO自主设计研发的Mx™分析软件提供强大的操作功能和完整的数据分析功能，包括Zernike，斜率，PSD / MTF / PSF，棱镜角度，角锥以及更多。该软件集仪器控制，数据采集和分析软件包与一体，集成了制造过程控制，运行自动化和报告关键中频特征等工具包。软件操作界面简单，直观。它还包括了基于Python的脚本和远程控制接口，以实现更大的灵活性并集成到复杂的测试设置中。ZYGO's in-house designed and developed Mx™ analysis software provides powerful operating functions and complete data analysis capabilities including Zernike, Slope, PSD/MTF/PSF, Prism Angle, Angle Cone and much more. The software combines instrument control, data acquisition and analysis packages with an integrated toolkit for manufacturing process control, operational automation and reporting of critical IF characteristics. The software interface is simple and intuitive. It also includes Python-based scripting and remote control interfaces for greater flexibility and integration into complex test setups.
ITF仪器传递函数-它是什么，为什么它是重要的(ITF Instrument Transfer Function - What it is and why it is important)
很多年来，大家一直关注于光学元件表面的形状误差，但随着对光学系统性能需求的增加，控制中频特征（MSF）也变得同样重要。对于一些极高性能应用，需要严格控制MSF特性以减少光散射并提高光学效率。在校正形状误差方面非常有效的小工具确定性抛光技术也会将不期望得到的中频特征赋予光学表面。根据表面特性的频率和斜率，传统的干涉仪系统-非常适合测量表面形状-由于分辨率有限，无法测量和量化较高频率的表面特性。分辨率的缺失意味着更高的频率细节被过滤（见右图），并且在测量结果中可能根本不显示。这是仪器传输函数（ITF）的所在。激光干涉仪系统由于其自身的设计（光学设计，相机，波长）会衰减和过滤部分表面信息，决定了该系统的ITF （测量光学表面的空间频谱的能力）。Verifire HDX激光干涉仪系统具有高分辨率3.4k x 3.4k传感器和优化的光学设计，具有比任何商业上可获得的干涉仪系统更高的ITF，使其成为可靠测量和量化光学表面中频特性的宝贵工具。这为光学设计师们提供了一种新能力，可以自信地指定光学表面到更高精度，并定义ITF测试要求来达到系统性能目标。For many years the focus has been on shape errors on the surface of optical components, but as the demand for optical system performance has increased, controlling the medium frequency characteristic (MSF) has become just as important. For some very high performance applications, tight control of MSF characteristics is required to minimize light scattering and improve optical efficiency.Gadget deterministic polishing techniques, which are very effective in correcting shape errors, can also impart undesired MSF characteristics to optical surfaces. Depending on the frequency and slope of the surface features, conventional interferometer systems-which are well suited to measuring surface shape-are unable to measure and quantify surface features at higher frequencies due to limited resolution. The lack of resolution means that higher frequency details are filtered (see right) and may not show up at all in the measurement results.This is where the instrument transfer function (ITF) comes in. A laser interferometer system, due to its own design (optical design, camera, wavelength) attenuates and filters some of the surface information, determining the system's ITF (the ability to measure the spatial spectrum of an optical surface.) The Verifire HDX laser interferometer system, with its high resolution 3.4k x 3.4k sensor and optimized optical design, has a higher ITF than any commercially available interferometer system, making it an excellent choice as an interferometer system. higher ITF than any commercially available interferometer system, making it an invaluable tool for reliably measuring and quantifying the IF characteristics of optical surfaces. This provides optical designers with a new ability to confidently specify optical surfaces to higher precision and define ITF test requirements to meet system performance goals.
